|
unigit_underlyingtheory.pdf
UNIGIT is a universal grating solver that is based on two solving methods:
" the Rigorous Coupled Wave Approach (RCWA)
" the Rayleigh Fourier Method
In addition to that the solving methods are embedded in a matrix scheme. This matrix scheme permits the step-by-step solution of general layer stacks. A general layer stack can comprise different types of layers. These layer types are detailed in this document.
|
